■ 基于≥0.5um粒径的各国洁净度等级近似对照表
个/M3≥0.5um |
ISO |
US |
US |
EEC |
FRANCE |
GERMANY |
JAPAN |
1 |
- |
- |
- |
- |
- |
- |
- |
3.5 |
2 |
- |
- |
- |
- |
0 |
2 |
10.0 |
- |
M1 |
- |
- |
- |
- |
- |
35.3 |
3 |
M1.5 |
1 |
- |
- |
1 |
3 |
100 |
- |
M2 |
- |
- |
- |
- |
- |
353 |
4 |
M2.5 |
10 |
- |
- |
2 |
4 |
1,000 |
- |
M3 |
- |
- |
- |
- |
- |
3,530 |
5 |
M3.5 |
100 |
A+B |
4,000 |
3 |
5 |
10,000 |
- |
M4 |
- |
- |
- |
- |
- |
35,300 |
6 |
M4.5 |
1,000 |
1,000 |
- |
4 |
6 |
100,000 |
- |
M5 |
- |
- |
- |
- |
- |
353,000 |
7 |
M5.5 |
10,000 |
C |
400,000 |
5 |
7 |
1,000,000 |
- |
M6 |
- |
- |
- |
- |
- |
3,530,000 |
8 |
M6.5 |
100,000 |
D |
4,000,000 |
6 |
8 |
10,000,000 |
- |
M7 |
- |
- |
- |
- |
- |