各国洁净度等级近似对照表
文章出处:KENID  整理日期:2012-08-27  浏览:1249

■ 基于≥0.5um粒径的各国洁净度等级近似对照表

 

个/M3≥0.5um

ISO
14644-1(1999)

US
209E(1992)

US
209D(1988)

EEC
GGMP(1989)

FRANCE
AFNOR(1981)

GERMANY
VDI 2083(1990)

JAPAN
JAOA(1989)

1

-

-

-

-

-

-

-

3.5

2

-

-

-

-

0

2

10.0

-

M1

-

-

-

-

-

35.3

3

M1.5

1

-

-

1

3

100

-

M2

-

-

-

-

-

353

4

M2.5

10

-

-

2

4

1,000

-

M3

-

-

-

-

-

3,530

5

M3.5

100

A+B

4,000

3

5

10,000

-

M4

-

-

-

-

-

35,300

6

M4.5

1,000

1,000

-

4

6

100,000

-

M5

-

-

-

-

-

353,000

7

M5.5

10,000

C

400,000

5

7

1,000,000

-

M6

-

-

-

-

-

3,530,000

8

M6.5

100,000

D

4,000,000

6

8

10,000,000

-

M7

-

-

-

-

-

 

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