洁净标准与洁净等级 (ISO 国际标准)
文章出处:KENID 整理日期:2012-08-27 浏览:1130次
■ 洁净标准与洁净等级 STANDARD&CLEANLINESS LEVEL ISO 14644(ISO 国际标准)
ISO等级 |
各粒径档最大容许粒子浓度 (颗/m3)
|
|||||
0.1um |
0.2um
|
0.3um
|
0.5um
|
1um
|
5um
|
|
1
|
10
|
2
|
|
|
|
|
2 |
100
|
24
|
10
|
4
|
|
|
3 |
1,000
|
237
|
102
|
35
|
8
|
|
4 |
10,000
|
2,370
|
1,020
|
32
|
83
|
|
5 |
100,000
|
23,700
|
10,200
|
3,520
|
832
|
29
|
6 |
1,000,000
|
237,000
|
102,000
|
35,200
|
8,320
|
293
|
7
|
|
|
|
352,000
|
83,200
|
2,930
|
8
|
|
|
|
3,520,000
|
832,000
|
29,300
|
9
|
|
|
|
35,200,000
|
8,320,000
|
293,000
|
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